Your Order

No items currently in order.

Just added

Quote Summary Checkout

To add this product to your quote cart or for CAD file access, please login or create an account.

Our Titanium Sublimation Pump (TSP) shrouds deliver very low hydrogen permeation, a high surface vacuum environment for condensation, and quick pump-down times, making them ideal for UHV, XHV, and UHP applications.

Atlas aluminum TSPs outperform their stainless steel counterparts due in part to the material’s very low hydrogen permeation (seven orders of magnitude less than stainless steel).

Atlas TSP shrouds are compatible with a range of industry-standard TSP filaments and controllers.

Contact an Atlas salesperson today for additional information, pricing, and availability.

Superior Performance

Atlas TSP Shrouds outperform their stainless steel counterparts with superior UHV and XHV performance. Our TSPs:

  • Offer very high pumping speeds.
  • Do not permeate hydrogen.
  • Provide very large surface areas that enable longer times between firings.
  • Are low cost per CFM (LPS).

Superior Pumping

  • Atlas TSP Shrouds maximize internal surface area for outstanding pumping speeds and heat dissipation while requiring no external water cooling during the operation.
  • Atlas TSPs are designed with line-of-sight shielding to prevent titanium particles from leaving the pump.
  • Used for UHV, XHV, and UHP.

Test Gas Maximum speed¹
Maximum capacity
of  film—x 10
H₂ 2.6
8-230 ͨ
H₂O 7.3

CO 8.2
N₂ 3.5
O₂ 8.7
CO₂ 4.7

Click image above for larger version.

Size A B C D E F G Part Number Actions
8" 7.97" 9.72" 5.75" 16.65" 13" 2.01" 3" TSP-0800
6" 5.97" 9.72" 3.75" 16.65" 13" 2.01" 3" TSP-0600
10" 9.97" 9.72" 7.75" 16.65" 13" 2.01" 3" TSP-1000
Size A B C D E F G Part Number Actions
6.50" 6.50" 3.09" 2.90" TSP-0650

Related Content

  • Aluminum’s Extreme Vacuum Performance

    Aluminum’s Extreme Vacuum Performance Any single physical or chemical property of aluminum may be enough reason to select aluminum as a vacuum chamber choice over stainless steel. But when looked at in summary, aluminum overwhelmingly surpasses stainless steel as providing the lowest cost of ownership. Aluminum has seven orders of magnitude less hydrogen than stainless … Continued

  • Next Generation Vacuum Systems: Aluminum

    Published in Solid State Technologies, May 1998, Page 79 Introduction: Written by: Richard Bothell and Justin Bothell, Atlas Technologies; Glen Tisdale, Judith Offerle, UHV Aluminum Company 300mm wafers with Achieving sub-micron feature sizes on a production basis requires an understanding of the complete processing environment including the vacuum reactor itself. Molecular level chemical contamination will … Continued

  • Titanium Sublimation Pumps

    Atlas aluminum “TSP”s outperform their stainless steel counterparts due, in part, to the material’s very low hydrogen permeation—seven orders of magnitude less than stainless steel. Atlas creates a high surface vacuum environment for condensation of the Ti pumping film without producing hydrogen. Stainless steel, on the other hand, desorbs hydrogen. A 42” wire seal chamber … Continued