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Water Cooled Chamber

Beneq brought us a design challenge for a water-cooled aluminum chamber to be used with ALD equipment. The chamber, designed to alternately deposit gas and water vapor, showed cooling channels welded to the chamber’s exterior. The channels posed a cost and manufacturing challenge. Atlas modified the design and, ultimately, Atlas and Beneq agreed to cut and cap the channels directly into the exterior sides of the chamber. Beneq cited lower overall cost and specific process requirements as reasons for using aluminum.